| 2026-06-12 | Mr. James Alan SchreinerExec. VP & COO | -3,50k | 1,21M | Verkauf | 345,52 - 347,00 | 19,20k | -15,42% |
| 2026-06-05 | Ms. Michelle M. McCarthyVP & CAO | -2,43k | 767,27k | Automatic Disposition | 315,23 | 2,00 | -99,92% |
| 2026-06-01 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | -6,00k | 1,89M | Verkauf | 314,43 | 10,42k | -36,54% |
| 2026-06-01 | Ms. Elizabeth A. MoraIndependent Director | -300,00 | 95,41k | Automatic Disposition | 318,02 | 18,36k | -1,61% |
| 2026-05-27 | Mr. Joseph B. DonahueIndependent Director | -2,10k | 688,70k | Verkauf | 327,95 | 9,25k | -18,50% |
| 2026-05-27 | Mr. Gerald G. ColellaChairman of the Board | -20,00k | 6,67M | Automatic Disposition | 330,38 - 338,58 | 28,23k | -41,46% |
| 2026-05-26 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | -2,50k | 826,25k | Automatic Disposition | 330,50 | 16,34k | -13,27% |
| 2026-05-22 | Mr. Ramakumar MayampurathExec. VP & CFO | -8,81k | 2,78M | Automatic Disposition | 315,48 | 1,00 | -99,99% |
| 2026-05-22 | Dr. John T. C. LeePresident, CEO & Director | -10,00k | 3,15M | Automatic Disposition | 315,48 | 144,70k | -6,46% |
| 2026-05-18 | Mr. Peter J. CannoneIndependent Director | -1,35k | 409,59k | Verkauf | 303,40 | 7,01k | -16,14% |
| 2026-05-14 | Dr. Jacqueline F. MoloneyIndependent Lead Director | -1.000,00 | 312,20k | Verkauf | 312,20 | 7,99k | -11,12% |
| 2026-05-13 | Dr. Jacqueline F. MoloneyIndependent Lead Director | -1,40k | 446,59k | Verkauf | 318,99 | 8,99k | -13,47% |
| 2026-05-11 | Mr. Eric Robert TarantoExec. VP & GM of Vacuum Solutions Division | -2,85k | 911,33k | Verkauf | 319,93 | 12,60k | -18,44% |
| 2026-05-11 | Ms. Kathleen F. BurkeSpecial Advisor | -4,36k | 1,39M | Verkauf | 319,94 | 49,44k | -8,10% |
| 2026-04-17 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | 914,75 | 0,00 | Derivative Exercise and Retained Stock | - | 4,56k | 25,13% |
| 2026-04-17 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | -825,97 | 222,92k | Derivative Exercise and Sale | 269,89 | 4,56k | - |
| 2026-04-15 | Ms. Michelle M. McCarthyVP & CAO | 2,44k | 0,00 | Derivative Exercise and Retained Stock | - | 2,44k | - |
| 2026-04-15 | Ms. Michelle M. McCarthyVP & CAO | -1,38k | 377,08k | Derivative Exercise and Sale | 274,15 | 2,44k | - |
| 2026-03-12 | Dr. Jacqueline F. MoloneyIndependent Lead Director | -340,11 | 72,71k | Verkauf | 213,77 | 7,91k | -4,12% |
| 2026-03-06 | Mr. Eric Robert TarantoExec. VP & GM of Vacuum Solutions Division | -4,57k | 1,01M | Verkauf | 220,52 | 15,45k | -22,82% |
| 2026-03-02 | Ms. Elizabeth A. MoraIndependent Director | -300,00 | 71,83k | Automatic Disposition | 239,44 | 16,18k | -1,82% |
| 2026-02-24 | Mr. James Alan SchreinerExec. VP & COO | -4,10k | 1,05M | Verkauf | 255,00 | 23,40k | -14,91% |
| 2026-02-20 | Mr. Gerald G. ColellaChairman of the Board | -20,00k | 5,07M | Verkauf | 252,90 - 253,97 | 45,76k | -30,42% |
| 2026-02-20 | Mr. Peter J. CannoneIndependent Director | -1,25k | 322,57k | Verkauf | 258,06 | 5,88k | -17,52% |
| 2026-02-20 | Mr. Eric Robert TarantoExec. VP & GM of Vacuum Solutions Division | -1,45k | 359,62k | Verkauf | 247,55 | 20,01k | -6,77% |
| 2026-02-20 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | -2,00k | 523,12k | Verkauf | 261,56 | 18,84k | -9,60% |
| 2026-02-20 | Ms. Michelle M. McCarthyVP & CAO | -1,47k | 366,50k | Verkauf | 249,57 - 250,35 | 0,00 | -100,00% |
| 2026-02-20 | Dr. Jacqueline F. MoloneyIndependent Lead Director | -829,00 | 205,22k | Verkauf | 247,55 | 8,25k | -9,13% |
| 2026-02-20 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | -2,04k | 523,74k | Verkauf | 256,41 | 3,64k | -35,95% |
| 2026-02-20 | Ms. Kathleen F. BurkeSpecial Advisor | -4,25k | 1,06M | Verkauf | 250,00 | 53,79k | -7,33% |
| 2026-02-20 | Dr. John T. C. LeePresident, CEO & Director | -30,00k | 7,70M | Verkauf | 256,05 - 259,70 | 154,70k | -16,24% |
| 2026-02-17 | Mr. Eric Robert TarantoExec. VP & GM of Vacuum Solutions Division | 3,76k | 0,00 | Derivative Exercise and Retained Stock | - | 21,47k | 21,24% |
| 2026-02-17 | Mr. Eric Robert TarantoExec. VP & GM of Vacuum Solutions Division | -2,71k | 707,07k | Derivative Exercise and Sale | 260,74 | 21,47k | - |
| 2026-02-17 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | 5,18k | 0,00 | Derivative Exercise and Retained Stock | - | 20,84k | 33,11% |
| 2026-02-17 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | -4,10k | 1,07M | Derivative Exercise and Sale | 260,74 | 20,84k | - |
| 2026-02-17 | Mr. James Alan SchreinerExec. VP & COO | 4,88k | 0,00 | Derivative Exercise and Retained Stock | - | 27,50k | 21,58% |
| 2026-02-17 | Mr. James Alan SchreinerExec. VP & COO | -4,34k | 1,13M | Derivative Exercise and Sale | 260,74 | 27,50k | - |
| 2026-02-17 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | 2,04k | 0,00 | Derivative Exercise and Retained Stock | - | 5,68k | 56,11% |
| 2026-02-17 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | -1,20k | 311,71k | Derivative Exercise and Sale | 260,74 | 5,68k | - |
| 2026-02-17 | Mr. Ramakumar MayampurathExec. VP & CFO | 3,14k | 0,00 | Derivative Exercise and Retained Stock | - | 8,81k | 55,48% |
| 2026-02-17 | Mr. Ramakumar MayampurathExec. VP & CFO | -2,52k | 656,01k | Derivative Exercise and Sale | 260,74 | 8,81k | - |
| 2026-02-17 | Ms. Kathleen F. BurkeSpecial Advisor | 6,89k | 0,00 | Derivative Exercise and Retained Stock | - | 58,05k | 13,46% |
| 2026-02-17 | Ms. Kathleen F. BurkeSpecial Advisor | -5,32k | 1,39M | Derivative Exercise and Sale | 260,74 | 58,05k | - |
| 2026-02-17 | Dr. John T. C. LeePresident, CEO & Director | 37,34k | 0,00 | Derivative Exercise and Retained Stock | - | 184,70k | 25,34% |
| 2026-02-17 | Dr. John T. C. LeePresident, CEO & Director | -32,55k | 8,49M | Derivative Exercise and Sale | 260,74 | 184,70k | - |
| 2025-12-02 | Ms. Elizabeth A. MoraIndependent Director | -300,00 | 47,64k | Automatic Disposition | 158,81 | 16,48k | -1,79% |
| 2025-11-17 | Mr. Ramakumar MayampurathExec. VP & CFO | 5,67k | 0,00 | Derivative Exercise and Retained Stock | - | 5,67k | - |
| 2025-11-17 | Mr. Ramakumar MayampurathExec. VP & CFO | -2,63k | 375,12k | Derivative Exercise and Sale | 142,74 | 5,67k | - |
| 2025-10-31 | Ms. Kathleen F. BurkeSpecial Advisor | -777,00 | 111,66k | Derivative Exercise and Sale | 143,71 | 51,08k | - |
| 2025-10-31 | Dr. John T. C. LeePresident, CEO & Director | -2,00k | 287,85k | Derivative Exercise and Sale | 143,71 | 147,27k | - |
| 2025-10-22 | Mr. James Alan SchreinerExec. VP & COO | -711,00 | 98,60k | Automatic Disposition | 138,68 | 22,54k | -3,06% |
| 2025-10-01 | Dr. Jacqueline F. MoloneyIndependent Lead Director | -300,00 | 36,64k | Automatic Disposition | 122,14 | 9,08k | -3,20% |
| 2025-09-18 | Mr. James Alan SchreinerExec. VP & COO | -838,00 | 103,91k | Automatic Disposition | 124,00 | 23,25k | -3,48% |
| 2025-09-18 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | -5,00k | 650,00k | Automatic Disposition | 130,00 | 15,57k | -24,31% |
| 2025-09-02 | Ms. Elizabeth A. MoraIndependent Director | -300,00 | 29,96k | Automatic Disposition | 99,85 | 16,78k | -1,76% |
| 2025-08-18 | Mr. James Alan SchreinerExec. VP & COO | 1,39k | 0,00 | Derivative Exercise and Retained Stock | - | 24,08k | 6,13% |
| 2025-08-18 | Mr. James Alan SchreinerExec. VP & COO | -1,25k | 125,17k | Derivative Exercise and Sale | 100,22 | 24,08k | - |
| 2025-08-15 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | 639,29 | 0,00 | Derivative Exercise and Retained Stock | - | 3,64k | 21,30% |
| 2025-08-15 | Mr. John Edward WilliamsEVP & GM of Photonics Solutions Division | -308,00 | 32,26k | Derivative Exercise and Sale | 104,73 | 3,64k | - |
| 2025-08-01 | Dr. Jacqueline F. MoloneyIndependent Lead Director | -300,00 | 27,63k | Automatic Disposition | 92,10 | 9,38k | -3,10% |
| 2025-07-07 | Mr. James Alan SchreinerExec. VP & COO | -957,00 | 98,04k | Automatic Disposition | 102,44 | 22,69k | -4,05% |
| 2025-07-03 | Mr. David Philip HenryEVP, Global Strategic Marketing & GM of Materials Solutions Division | -2,00k | 210,00k | Automatic Disposition | 105,00 | 20,57k | -8,86% |