The System Will be Used in Sub 3 Nanometer
Logic Device Development
BEVERLY,
Mass., Oct. 10, 2023 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today a shipment of the Purion Dragon™ high
current implanter to a world-leading research and innovation center
in nanoelectronics and digital technologies located in Europe. The system will be used in technology
development for advanced logic devices. The system shipped in the
third quarter of 2023.
Executive Vice President, Marketing and Applications,
Greg Redinbo, commented, "We're
pleased to support growth in the advanced logic market with a new
customer focused on R&D for sub 3 nanometer logic device
development. This is the second Purion Dragon placed in an advanced
logic R&D environment. We designed the Purion Dragon
specifically to address chipmakers' most challenging ion
implantation applications by delivering the highest levels of
process control with significant productivity gains for high
current applications. The Purion Dragon features a unique high
current implanter architecture, featuring innovative orthogonal
beam optics, and is designed to address critical implant steps for
advanced memory and logic applications."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
45 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE AXCELIS TECHNOLOGIES, INC