Will incorporate Hafnium-based materials into 28 nm manufacturing and
initiate process development for advanced generation high-k gates
ALMERE, the Netherlands, April 28, 2009 -ASM International N.V.
(NASDAQ: ASMI and Euronext Exchange in Amsterdam: ASM), announced
that a Taiwanese foundry has selected ASM's Pulsar® atomic layer
deposition (ALD) tool for the volume manufacturing of its 28 nm node
high-k gate dielectric process.
Additionally, the foundry will pursue process development activity
with ASM for their advanced generation high-k gates. ASM will deliver
additional Pulsar process modules during the second quarter of 2009
for the advanced node development program. The foundry has worked
with ASM's ALD high-k and metal gate equipment over the past four
years to develop its high-k gate process, which utilizes
hafnium-based materials.
"Achieving a successful high-k manufacturing process for the 28 nm
node is a testament to ASM's ability to integrate new materials into
manufacturing," said Glen Wilk, business unit manager for transistor
products at ASM. "Having qualified our high-k process demonstrates
its readiness for manufacturing at the 28 nm node, and we look
forward to advanced developments that extend those same benefits to
future nodes."
ASM's Pulsar was the first tool to be used in volume manufacturing of
high-k gates, starting at the 45 nm node and now that lead is
extending to the 28nm node. ASM's high-k gate films include multiple
hafnium based oxides, with aluminum oxide and lanthanum oxide
available as high-k cap layers for metal electrode work function
tuning.
About ASM International
ASM International N.V., headquartered in Almere, the Netherlands, and
its subsidiaries design and manufacture equipment and materials used
to produce semiconductor devices. ASM International and its
subsidiaries provide production solutions for wafer processing
(Front-end segment) as well as assembly and packaging (Back-end
segment) through facilities in the United States, Europe, Japan and
Asia. ASM International's common stock trades on NASDAQ (symbol ASMI)
and the Euronext Amsterdam Stock Exchange (symbol ASM). For more
information, visit ASMI's website at www.asm.com.
Safe Harbor Statement under the U.S. Private Securities Litigation
Reform Act of 1995: All matters discussed in this statement, except
for any historical data, are forward-looking statements.
Forward-looking statements involve risks and uncertainties that could
cause actual results to differ materially from those in the
forward-looking statements. These include, but are not limited to,
economic conditions and trends in the semiconductor industry
generally and the timing of the industry cycles specifically,
currency fluctuations, financing and liquidity matters, the success
of restructurings, the timing of significant orders, market
acceptance of new products, competitive factors, litigation involving
intellectual property, shareholder and other issues, commercial and
economic disruption due to natural disasters, terrorist activity,
armed conflict or political instability, epidemics and other risks
indicated in the Company's filings from time to time with the U.S.
Securities and Exchange Commission, including, but not limited to,
the Company's reports on Form 20-F and Form 6-K. The Company assumes
no obligation nor intends to update or revise any forward-looking
statements to reflect future developments or circumstances.
For further information, please contact:
Investor contacts:
Erik Kamerbeek
+ 31 88 100 8500
Erik.kamerbeek@asm.com
Mary Jo
Dieckhaus
+1 212-986-2900
MaryJo.Dieckhaus@asm.com
Media contact:
Charles Huijskens
+31 20 6855 955
Mobile: +31 653 105072
c.huijskens@huijskens.nl
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