Novellus Systems Ships 1000th VECTOR(R) PECVD System
01 Februar 2010 - 10:05PM
PR Newswire (US)
Industry-leading Dielectric Deposition System Accepted by
GLOBALFOUNDRIES for High-volume Manufacturing SAN JOSE, Calif.,
Feb. 1 /PRNewswire-FirstCall/ -- Novellus Systems (NASDAQ:NVLS)
today announced that it has shipped the company's 1000th VECTOR
plasma-enhanced chemical vapor deposition (PECVD) system to
GLOBALFOUNDRIES' Fab 7 in Singapore. A leading provider of advanced
semiconductor manufacturing technology, GLOBALFOUNDRIES recently
integrated the operations of Chartered Semiconductor Manufacturing,
and will use the milestone 300mm VECTOR Express(TM) for high-volume
manufacturing at the 65nm technology node and beyond in Fab 7.
(Photo: http://www.newscom.com/cgi-bin/prnh/20100201/SF47334)
Originally introduced in July of 2000, the VECTOR system is a
manufacturing workhorse used to deposit a wide range of dielectric
applications. In the front-end-of-line (FEOL), VECTOR is used to
deposit gate spacers and liners, high stress films for straining
silicon, amorphous carbon and anti-reflective layers, hard mask
films and etch stop layers. Back-end-of-line (BEOL) applications
include inter-metal and inter-layer dielectrics, copper diffusion
barrier films, low dielectric constant capping layers, and final
passivation layers. Recently, VECTOR is being employed for emerging
dielectric applications, such as ultra-low dielectric constant
(ULK) films and dielectric layers used in through-silicon-via (TSV)
packaging technology. VECTOR's strong acceptance in the
semiconductor manufacturing market is a result of the product's
high capital productivity, low installation and operating costs,
small system footprint, high wafer-to-wafer repeatability, and
single digit defect performance in the sub-100 nm particle sizes.
"The Novellus VECTOR platform is used in high-volume production at
65nm and in the advanced 45/40nm technology nodes in Fab 7 for both
FEOL and BEOL dielectric applications," said Peter Benyon, head of
Fab 7 operations at GLOBALFOUNDRIES. "We look forward to continuing
our partnership with Novellus in developing cost-effective,
advanced technological solutions to help our customers rapidly
bring their innovative designs to market." "We are very pleased to
be commemorating this milestone shipment with the company's
acceptance of our 1000th tool, as Chartered becomes a part of the
new GLOBALFOUNDRIES," said Kevin Jennings, senior vice president of
Novellus' PECVD business unit. "Chartered purchased its first
VECTOR system in 2004, and had long been an important customer of
Novellus. We hope to develop an equally close relationship with
GLOBALFOUNDRIES." About Novellus Novellus Systems, Inc.
(NASDAQ:NVLS) is a leading provider of advanced process equipment
for the global semiconductor industry. The company's products
deliver value to customers by providing innovative technology
backed by trusted productivity. An S&P 500 company, Novellus is
headquartered in San Jose, Calif. with subsidiary offices across
the globe. For more information, please visit
http://www.novellus.com/ Novellus and VECTOR are registered
trademarks, and VECTOR Express is a trademark of Novellus Systems,
Inc. http://www.newscom.com/cgi-bin/prnh/20100201/SF47334
DATASOURCE: Novellus Systems, Inc. CONTACT: Bob Climo of Novellus
Systems, Inc., +1-408-943-9700, ; or Marla Kertzman of The Hoffman
Agency, +1-408-975-3032, , for Novellus Systems, Inc. Web Site:
http://www.novellus.com/
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