Trymax Receives Order from a Leading-Edge Photonics Research Organization
21 August 2019 - 3:30PM
Business Wire
Eindhoven University of Technology (TU/e) acquires a plasma
solution from Trymax
Trymax Semiconductor Equipment BV (Trymax), a global leader in
plasma solutions, today announced it has received an order from
NanoLab@TU/e of Eindhoven University of Technology. The NEO 200A
series from Trymax with microwave downstream plasma technology was
selected to perform resist stripping, descum and surface cleaning
on indium phosphide (InP) wafers. This order illustrates the
competitiveness of the single chamber and fully automated solution
of Trymax for the photonics market.
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Trymax Receives Order from a Leading-Edge
Photonics Research Organization (Graphic: Business Wire)
“European research organizations and equipment companies are at
the forefront of the global photonics industry” commented Carlos
Lee, Director General of European Photonics Industry Consortium
(EPIC). “Having a company such as Trymax collaborating with
Eindhoven University of Technology goes in the right direction to
build an efficient manufacturing infrastructure”.
Eindhoven University of Technology selected Trymax after running
technical demonstrations on InP substrate and other compound
semiconductor substrates. The results achieved on the NEO 200A
platform in term of ash rate, non-uniformity and handling of
critical substrate materials of different sizes outperformed
competing solutions.
“Beyond silicon, Trymax has a long experience and unique
capabilities in handling various substrates materials such as SiC,
GaN, GaAs, LiNbO3, LiTaO3, glass, and eWLB” stated Leo Meijer, CEO
of Trymax. “Having a recognized university such as Eindhoven
University of Technology as a customer is an honor. Trymax, as a
Dutch headquartered company, is proud to have the researchers and
students from Eindhoven University of Technology developing the
photonic solutions of the future with our system”.
“Eindhoven University of Technology has chosen the Trymax NEO
200A because of the robustness of the tool, the expertise of the
Trymax team and the short distance to the lab, all which is
superior to what we found elsewhere on the market” mentioned Huub
Ambrosius, Managing Director of NanoLab@TU/e.
The NEO 200A system will be installed at Eindhoven University of
Technology in Q3 2019.
About Trymax Semiconductor Equipment BV:
Trymax’s core business is to support semiconductor manufacturers
through the world with innovative plasma-based solutions for photo
resist removal, surface cleaning, isotropic etch, as well as UV
curing/charge erase, that are used in the fabrication of integrated
circuits and other semiconductor devices. Trymax is a privately
held company headquartered in Nijmegen, The Netherlands. Trymax
operates regional offices in China (Suzhou) and Italy (Milan).
Learn more at www.trymax-semiconductor.com.
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Yann Guillou Global Marketing & Sales Director +31 24 350 08
09 Yann.guillou@trymax-semiconductor.com